DALIX
DaLI is a universal table-top system for maskless lithography with all standard photoresists.
Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution for the maskless lithography process, regardless of users’ prior knowledge.
Using a precisely guided laser source for the illumination of lithographic structures, DaLI skips the need for a mask.
Mask less photolithography features make design changes a breeze, since it eliminates the highly sensitive step of sample-to-mask alignment, and saves both time and money in the process.
DaLI makes for an infallible partner, also in state-of-the-art scientific endeavors, as it enables direct write lithography on micrometer sized samples, with structures precisely aligned on existing features
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