LSD4: Defect Mapping

LSD4 is a Laser Scanning Defect Mapping System that can scan 100 mm × 100 mm with 50 µm resolution in under 4 minutes. The laser scanning defect imager is an upgraded version of the Laser Beam Induced Current (LBIC) test, which utilizes a laser beam with a wavelength energy greater than the semiconductor bandgap to irradiate the semiconductor and generate electron–hole pairs. By rapidly scanning the surface of the sample, it obtains an image distribution that reveals changes in internal current to analyze various defect distributions, helping to analyze the quality of sample preparation and aid in process improvement.