SC-1 SERIES: (PE)-ALD & PVD Fully Automated Compact Cluster System

The SC-1 is a ground-breaking and high-performing cluster equipment that combines Atomic Layer Deposition (ALD) with Physical Vapor Deposition (PVD) in an extremely compact, modular, and fully automated system for high-throughput production of multinanolayered coatings from the ALD and PVD materials library. Its innovative patent-pending design eliminates the need for transfer arms and multiple antechambers, significantly reducing lab space, and the high acquisition, operating and maintenance costs. The system performs both thermal and PE-ALD as well as PVD without breaking vacuum or moving samples between chambers, enabling rapid fabrication of hundreds of multinanolayered films. The SC-1 systems scalable, modular, and flexible architecture, allows to easily increase or decrease chamber dimensions, adapt new hardware and incorporate multiple in-situ metrology equipment.