Overview
MPI TS150 is a 150 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.
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TS150: 150 mm Manual Probe System
MPI TS150 is a 150 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.
Key Features
Universal Use
- Designed for wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering, MEMS and High Power.
Ergonomic Design
- Unique puck controlled air bearing stage for quick single-handed operation.
- Rigid platen accommodates up to 10 DC or 4 RF positioners.
- Highly repeatable platen lift design with three discrete positions for contact, separation, and loading.
Upgradability
- Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, Optics, microscopes and EMI shielded dark box to support various application requirements.
Specifications
| Chuck XY Stage (Standard) | |
|---|---|
| Total travel range | 180 x 230 mm (7.1 x 9.1 in) |
| Fine-travel range | 25 x 25 mm fine micrometer control |
| Fine-travel resolution | < 1.0 μm (0.04 mils) @ 500 μm/rev |
| Planarity | < 10 μm |
| Theta travel (standard) | 360° |
| Theta travel (fine) | ± 5.0° |
| Theta resolution | 7.5 x 10-3 gradient |
| Movement | Puck controlled air bearing stage |
| Optional XY Stage for TS150-ES | |
| Planarity | < 10 μm (0.4 mils) |
| Theta travel (standard) | Free movement up to 360° |
| Movement | Easy puck controlled air bearing stage for TS150-ES |
| Fine adjustment | N/A |
| Manual Microscope Stage (Air Bearing) | |
| Movement range | 25 x 25 mm (1 x 1 in) |
| Resolution | N/A |
| Scope lift | Manual, tilt-back |
| Movement | Air bearing control, fixed by vacuum |
| Manual Microscope Stage (Linear) | |
| Movement range | 50 x 50 mm (2 x 2 in) |
| Resolution | <5 μm (0.2 mils) |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) |
| Movement | Independently controlled X and Y movement with locking screws |
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