Overview
MPI TS150-THZ is a 150 mm Manual Probe System. It is industry’s first explicitly designed probe system for accurate measurements at mm-wave and sub-mm wave (THz) frequency range.
MPI TS150-THZ is a 150 mm Manual Probe System. It is industry’s first explicitly designed probe system for accurate measurements at mm-wave and sub-mm wave (THz) frequency range.
MPI TS150-THZ is a 150 mm Manual Probe System. It is industry’s first explicitly designed probe system for accurate measurements at mm-wave and sub-mm wave (THz) frequency range.
Variety of Applications
Ergonomic Design
Upgradability
| Chuck XY Stage (Standard) | |
|---|---|
| Total travel range | 240 x 315 mm (9.4 x 12.4 in) |
| Fine-travel range | 25 x 25 mm fine micrometer control |
| Fine-travel resolution | < 1.0 µm (0.04 mils) @ 500 µm/rev |
| Planarity | < 10 µm |
| Theta travel (standard) | 360° |
| Theta travel (fine) | ± 5.0° |
| Theta resolution | 7.5 x 10-3 gradient |
| Movement | Puck controlled air bearing stage |
| Chuck Z Stage | |
| Travel range | 10 mm (0.4 in) |
| Fine-travel resolution | < 1.0 µm (0.04 mils) @ 500 µm/rev, with digital indicator |
| Manual Microscope Stage (Linear) | |
| Movement range | 50 x 50 mm (2 x 2 in) |
| Resolution | < 5 µm (0.2 mils) |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) |
| Movement | Independently controlled X and Y movement with locking screws |