Overview
MPI TS200 is a 200 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.
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TS200: 200 mm Manual Probe System
MPI TS200 is a 200 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.
Key Features
Universal Use
- Designed for wide variety of applications such as RF and mmW, Device Characterization, Wafer Level Reliability, High Power, Failure Analysis, IC Engineering and MEMS.
Ergonomic Design
- Unique puck controlled air bearing stage for quick single-handed operation.
- Rigid platen accommodates up to 10 DC or 4 RF positioners.
- Highly repeatable platen lift design with three discrete positions for contact, separation, and loading.
Upgradability
- Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, microscopes and EMI shielded DarkBox to support various application requirements.
Specifications
| Chuck XY Stage (Standard) | ||
|---|---|---|
| Total travel range | 240 x 315 mm (9.4 x 12.4 in) | |
| Fine-travel range | 25 x 25 mm fine micrometer control | |
| Fine-travel resolution | < 1.0 µm (0.04 mils) @ 500 µm/rev | |
| Planarity | < 10 µm | |
| Theta travel (standard) | 360° | |
| Theta travel (fine) | ± 5.0° | |
| Theta resolution | 7.5 x 10-3 gradient | |
| Movement | Puck controlled air bearing stage | Manual Microscope Stage (Air Bearing) |
| Movement range | 25 x 25 mm (1 x 1 in) | |
| Resolution | N/A | |
| Scope lift | Manual, tilt-back | |
| Movement | Air bearing control, fixed by vacuum | |
| Manual Microscope Stage (Linear) | ||
| Movement range | 50 x 50 mm (2 x 2 in) or 80 x 80 mm (3.15 x 3.15 in) | |
| Resolution | <5 µm (0.2 mils) | |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) | |
| Movement | Independently controlled X and Y movement with locking screws | |
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