Overview
MPI TS200-HP is a 200 mm Manual Probe System for accurate and reliable RF and mmW Measurements on PCB Boards
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TS200-HP: 200 mm Manual Probe System for High Power measurements
MPI TS200-HP is a 200 mm Manual Probe System for accurate and reliable high power measurements.
Key Features
Dedicated designed for High Voltage and High Current application
- On wafer high power device measurement up to 10kV/600A
- Gold plated chuck surface for minimum contact resistance and vacuum holes optimized for thin wafer handling down to 50 µm.
- Taiko wafer chuck option.
- Dedicated high voltage and high current probes.
- Anti-arcing solutions.
MPI ShielDEnvironment™ for Accurate Measurements
- Design for Advanced EMI / RFI / Light-Tight Shielding.
- Platen ArcShield™.
- fA low-leakage capabilities.
- Ready for temperature range -60 °C to 300 °C.
Ergonomic Design and Safety
- Unique puck controlled air bearing stage for quick singlehanded operation.
- Regulatory approved safety interlocked light curtain integrated with vibration isolation table to protect users.
- Available with various chuck options and wide range of accessories such as MicroPositioners, microscopes.
Specifications
| Chuck XY Stage (Standard) | |
|---|---|
| Total travel range | 225 x 260 mm (8.9 x 10.2 in) |
| Fine-travel range | 25 x 25 mm fine micrometer control |
| Fine-travel resolution | < 1.0 µm (0.04 mils) @ 500 µm/rev |
| Planarity | < 10 µm |
| Theta travel (standard) | 360° |
| Theta travel (fine) | ± 5.0° |
| Theta resolution | 7.5 x 10-3 gradient |
| Movement | Puck controlled air bearing stage |
| Chuck Z Stage | |
| Travel range | 5 mm (0.2 in) |
| Fine-travel resolution | < 1.0 µm (0.04 mils) @ 500 µm/rev |
| Load stroke | 20 mm, pneumatically |
| Manual Microscope Stage (Linear) | |
| Movement range | 50 x 50 mm (2 x 2 in) |
| Resolution | <5 µm (0.2 mils) |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) |
| Movement | Independently controlled X and Y movement with locking screws |
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