Overview
MPI TS2000-SE is a 200 mm Automated Probe System for accurate and reliable DC/CV, RF and mmW measurements
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TS2000-SE: 200 mm Automated Probe System with ShielDEnvironment
MPI TS2000-SE is a 200 mm Automated Probe System for accurate and reliable DC/CV, RF and mmW measurements.
Key Features
Designed for Variety of On-Wafer Applications
- Device Modeling – DC-IV / DC-CV / Pulse-IV.
- RF and mmW – RF Setup from 26 GHz to 110 GHz & beyond.
- Failure Analysis – Probe card / Internode Probing.
- Wafer Level Reliability – Hot / Cold / Long-term test.
MPI ShielDEnvironment™ for Accurate Measurements
- Designed for Advanced EMI / RFI / Light-Tight Shielding.
- fA low-leakage capabilities.
- Ready for temperature range -60 °C to 300 °C.
Ergonomic Design and Options
- Front and advanced automated single wafer side loading capability with easy pre-alignment for automated routines.
- Vertical Control Environment (VCE™) with observation of the probing area from the side for safe operation.
- Integrated active vibration isolation.
- Completely integrated prober control for faster, safer and convenient system and test operation.
- The Safety Test Management (STM™) option to load/ unload wafers at any chuck temperatures and auto dew point control.
Specifications
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 210 x 300 mm (8.27 x 11.81 in) |
| Resolution | 0.5 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 2.0 µm |
| XY stage drive | High resolution stepper motor with linear encoder feedback system |
| Speed | 4-Speed XY chuck stage adjustable speed movement Slowest: 10 µm / sec | Fastest: 50 mm / sec |
| Chuck Z Stages (Programmable) | |
| Travel range | 50 mm (2 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 1.0 µm |
| Z stage drive | High resolution stepper motor with integrated pin drive system for easy wafer loading |
| Speed* | 3-Speed Z chuck stage adjustable speed movement Slowest: 10 µm / sec | Fastest: 20 mm / sec |
| Chuck Theta Stage (Programmable) | |
| Travel range | ± 6.0° |
| Resolution | 0.0004° |
| Accuracy | < 2.0 µm (measured at the edge of the 200 mm chuck) |
| Repeatability | < 1.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
| Video Camera (Vertical Control Environment | |
| Sensor type | 1/1.8″ mono CCD |
| Sensor size | 7.07 mm x 5.3 mm |
| Camera pixels | 3 MP |
| Resolution | 2048 x 1536 pixels |
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