Overview
MPI TS2000 Series is a 200 mm Automated Probe System for reliable DC, RF and High Power Production Test Measurements.
Hover
TS2000 SERIES: 200 mm Automated Probe Systems
MPI TS2000 Series is an Automated Probe System for up to 200 mm wafers, for reliable DC, RF and High Power Production Test Measurements.
Key Features
Designed for wide variety of On-Wafer Production Applications
- DC-IV / DC-CV / Pulsed-IV applications.
- RF applications up to 67 GHz & 4-port setup.
- High Power production application up to 10 kV / 600 A.
- IC Design validation from ambient to 300 °C.
Production Reliability
- Designed for 24/7 production reliability.
- Integrated passive vibration isolation table.
- Optional active vibration isolation base.
- Ready for temperature ambient to 300 °C.
Ergonomic Design and Options
- Designed with easy single wafer front loading.
- Large Probe Platen supporting up to 12x DC or 4x DC + 4x RF MicroPositioners or standard 4.5” probe card holder.
- Available with various chuck options and wide range of accessories such as 4.5″ probe card adaptor, DC/RF MicroPositioners, microscopes to support various application requirements.
Specifications
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 210 mm x 340 mm (8.3 x 13.4 in) |
| Resolution | 0.1 µm |
| Accuracy | < 4.0 µm |
| Repeatability | < 1.0 µm |
| XY stage drive | Closed-loop high precision servo motor PID control |
| Speed | 5-Speed XY chuck stage speed movement |
| Max. movement speed | 100 mm/sec |
| Chuck Z Stage(Programmable) | |
| Travel range | 10 mm (0.4 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 1.0 µm |
| Z stage drive | Closed-loop high precision servo motor PID control |
| Speed | 5-Speed Z chuck stage adjustable speed movement |
| Max. movement speed | 30 mm/sec |
| Chuck Theta Stage (Programmable) | |
| Travel range | ±5.0° |
| Resolution | 0.0004° |
| Accuracy | < 3.0 µm (measured at the edge of the 200 mm chuck) |
| Repeatability | < 2.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
Get in Touch
Please fill out the form and we will get back to
you within 24 hours.
Write to Us
Our friendly team is here to help.
info@trokutsolutions.com
Call Us
Our friendly team is here to help.
(+91) (022) 40124404
