Overview
MPI TS2500 is a 200 mm Fully Automated Probe System for accurate and reliable RF and High Power 24/7 Production Tests
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TS2500
MPI TS2500 is a 200 mm Fully Automated Probe System for accurate and reliable RF and High Power 24/7 Production Tests
Key Features
Designed for Variety of On-Wafer Applications
- RF measurements up to 67 GHz & 4-port setup
- Integration of broadband measurements up to 220 GHz
- Simultaneously for RF, DC-IV / DC-CV / Pulsed-IV measurements
- High Power applications up to 10 kV/400 A
Production Reliability
- Designed for 24/7 production reliability
- Safety cover with interlocks providing a closed environment
Ergonomic Design and Options
- Designed with easy single wafer front loading and unloading
- Large Probe Platen supporting up to 4x RF MicroPositioners or standard 4.5” / 6.5” probe card holder
- Standard two cassettes for 100, or 150 or 200 mm wafers
- Available with various ambient or thermal chucks from 20 to 300 °C
- Wide range of on-axis optics in addition to
- Standard off-axis wafer alignment camera
- Optional upper looking chuck camera for probe-to-pad alignment
- Dedicated thin wafer handling option down to 50 µm
Specification
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 298 mm x 350 mm (11.7 x 13.7 in) |
| Resolution | 0.1 µm |
| Accuracy | < 4.0 µm |
| Repeatability | < 2.0 µm |
| Chuck Z Stage (Programmable) | |
| Travel range | 16 mm (0.6 in) |
| Resolution | 0.2 µm |
| Repeatability | < 1.0 µm |
| Chuck Theta Stage (Programmable) | |
| Travel range | ± 5.0° |
| Resolution | 0.00125° |
| Accuracy | < 3.0 µm (measured at the edge of the 200 mm chuck) |
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