Overview
MPI TS3000 is a 300 mm Automated Probe System. It is a cost-effective system for RF, mmW and Product Engineering
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TS3000: 300 mm Automated Probe System
MPI TS3000 is a 300 mm Automated Probe System. It is a cost-effective system for RF, mmW and Product Engineering.
Key Features
Designed for Variety of On-Wafer Applications
- DC-IV / DC-CV / Pulsed-IV applications.
- RF, mmW, load-pull applications & 4-port setup.
- IC Design Validation, Failure Analysis in wide temperature range from 20 to 300 °C.
Extended Flexibility
- Using MicroPositioners and probe cards simultaneously.
- Programmable microscope movements for more automation and ease of use.
- The shortest cable interface to IC tester.
- Minimize the platen-to-chuck distance for mmW & probing with active probes.
- Supports film-frame probing.
- Upgradable with IceFreeEnvironment™.
Ergonomic Design and Footprint
- Easy wafer or single DUT loading from the front.
- Integrated active vibration isolation.
- Completely integrated prober control for faster, safer and convenient system and test operation.
- The Safety Test Management (STM™) with automated dew point control.
- Reduced footprint due to smart chiller space arrangement.
- Instrument shelf option for shorter cables and higher measurement dynamic.
Specifications
| Chuck XY Stage (Programmable) | ||
|---|---|---|
| Travel range | 310 mm x 335 mm (12.2 x 13.19 in) | |
| Resolution | 0.5 µm | |
| Accuracy | < 2.0 µm (0.08 mils) | |
| Repeatability | < 1.0 µm | |
| XY stage drive | Closed-loop high precision stepper motors | |
| Speed* | Slowest: 10 µm/sec | Fastest: 50 mm/sec | Chuck Z Stage (Programmable) |
| Travel range | 30 mm (1.18 in) | |
| Resolution | 0.2 μm | |
| Accuracy | < 2.0 μm | |
| Repeatability | < 1.0 μm | |
| Z stage drive | Closed-loop high precision stepper motor | |
| Speed* | Slowest: 10 μm / sec | Fastest: 20 mm / sec | |
| Guider | Precision ball bearings | |
| Chuck Theta Stage (Programmable) | ||
| Travel range | ±5.0° | |
| Resolution | 0.0001° (0.24 µm @ 300 mm edge) | |
| Accuracy | <2.0 µm (measured at the edge of the 300 mm chuck) | |
| Repeatability | <1.0 µm | |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system | |
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