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SG-A: CMOS Image Sensor Tester

SG-A from Enlitech is a CMOS Image Sensor Tester that can provide the most comprehensive CMOS image sensor parameter characterization, including full-spectrum quantum efficiency (QE), overall system gain (K), temporal dark noise, signal-to-noise ratio, absolute sensitivity threshold, saturation capacity, dynamic range, DSNU, PRNU, linearity error, and chief-ray angle (CRA).
The device under test can be various types of CMOS image sensor modules, with inspection procedures compliant with the EMVA 1288 standard. The SG-A CMOS image sensor tester can be used for wafer-level optics inspection, process parameter control, micro-lens design, and micro-lens verification. Its highly collimated beam (< 1°) can overcome the inspection difficulties of new manufacturing processes that traditional optical systems, such as integrating sphere systems, cannot solve. The processes include small pixel sizes (< 1 µm), BSI and 3D stacking, micro-lens, new Bayer array designs, and so on.

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Overview

CMOS Image Sensor Tester: The SG-A system is the world’s first commercial CMOS Image sensor tester. SG-A can provide the most comprehensive CMOS image sensor parameter characterizations, such as full-spectrum quantum efficiency QE, overall system gain K, temporal dark noise, signal-to-noise ratio, absolute sensitivity threshold, saturation capacity, dynamic range, DSNU, PRNU, Linearity error, and chief-ray angle CRA.

Key Features

  • Non-destructive optical inspection.
  • High collimated beam angle; <0.05°, <0.1°, <0.5°, <1°, <3°(different models).
  • High Uniform Beam spot: ≥ 99%.
  • Light instability ≤ 1%.
  • High dynamic range testing capability: 80dB~140dB (different models).
  • Can test CMOS image sensor parameters: Quantum efficiency, Spectral Response, System Gain, Sensitivity, Dynamic Range, Dark Current/Noise, SNR, Saturation Capacity, Linearity Error (LE), DCNU (Dark Current Non-Uniformity), PRNU (Photo Response Non-Uniformity), CRA (Chief Ray Angle).
  • Full Spectrum wavelength range: 300nm-1100nm or 350nm~1000nm (PTC).
  • Wavelength can be extended to 1700nm or more.
  • DUT package: CIS module, PCB Board level, CIS Camera, with/without micro-lens.
  • “Direct” or “Handshake” communication protocol between SG-A and DUT.
  • Customized test fixture and stages (manual or automatic, max 6-axises).
  • Powerful analyzing software ARGUS®.
  • Application: fingerprint recognition (CIS+Lens, CIS+collimator, TFT-array sensor) micro-lens design of CIS, wafer level optics inspection, CIS DSP chip algorithm development, Si TFT sensor panel, Time-of-Flight camera sensor, Proximity Sensor (Quantum efficiency, sensitivity, linearity, SNR et al.,),d-ToF sensor, i-ToF sensor, Multi-spectral sensor, Ambient light sensor (ALS), Fingerprint-Under-Display (FoD) sensor.

Specifications

Item Specification
Full-spectrum Wavelength Range 300–1100 nm or 350–1000 nm (PTC)
Extended Wavelength Range Extendable up to 1700 nm or more
Single Wavelength Source 470 nm, 530 nm, 630 nm, 940 nm (±5 nm), or customized
Dynamic Range 80 dB, 100 dB, or 140 dB
Test Fixtures DUT ≤ 100 mm × 100 mm × 30 mm (Height), basic type or customized
Stage Options Non; manual 3-axis; or 6-axis (manual + automatic), customizable

Applications

  • Fingerprint recognition (CIS + Lens, CIS + collimator, TFT-array sensor)
  • Micro-lens design of CIS, wafer-level optics inspection
  • CIS DSP chip algorithm development
  • Si TFT sensor panel
  • Time-of-Flight camera sensor
  • Proximity sensor (Quantum efficiency, sensitivity, linearity, SNR et al.)
  • d-ToF sensor, i-ToF sensor
  • Multi-spectral sensor
  • Ambient light sensor (ALS)
  • Fingerprint-Under-Display (FoD) sensor

Can test CMOS image sensor parameters:

  • Quantum efficiency
  • Spatial nonuniformity (DSNU, PRNU)
  • Overall system gain
  • Linearity error
  • Temporal dark noise
  • CRA
  • Signal-to-noise ratio
  • Saturation capacity
  • Absolute sensitivity threshold
  • Dynamic range

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