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SG-O: CIS / ALS / Light-Sensor Wafer Tester

SG-O from Enlitech is a CIS / ALS / Light-Sensor wafer tester which combines a Highly Uniform Light Source and a Semi-Automatic Wafer Prober. The Highly Uniform Light Source can provide a continuous white light spectrum from 400nm to 1700nm with the monochromatic light output with certain FWHM at many different wavelength. The Prober can handle max. 200mm wafer size and single die of size greater than 1cm x 1cm. SG-O integrates a ultra-low noise thermal chuck which can provide the temperature range from -60°C to 180 °C with rapid temperature ramping speed and stability. SG-O provides all you need in CIS / ALS / Light-Sensor design validation or process-yield checking.

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Overview

SG-O from Enlitech is a CIS / ALS / Light-Sensor wafer tester which combines a Highly Uniform Light Source and a Semi-Automatic Wafer Prober. The Highly Uniform Light Source can provide a continuous white light spectrum from 400nm to 1700nm with the monochromatic light output with certain FWHM at many different wavelength. The Prober can handle max. 200mm wafer size and single die of size greater than 1cm x 1cm. SG-O integrates a ultra-low noise thermal chuck which can provide the temperature range from -60°C to 180 °C with rapid temperature ramping speed and stability. SG-O provides all you need in CIS / ALS / Light-Sensor design validation or process-yield checking.

Key Features

Highly Uniform Light Source

  • Wide Spectral Range from UV to SWIR.
  • Highly Uniformity Better Than 98% Over 50mm x 50mm Area
  • Ultra-stable light intensity, instability of < 0.2% over 10 hours
  • High Light Intensity Dynamic Range, up to 140dB

Programable Automatic Prober

  • 200mm~10mm wafer or die handling capability
  • For Most Accurate and Reliable DC / CV, RF Measurements
  • Stable and Functional Microscope System
  • Integrated Hardware Control Panel
  • Automated Wafer Loader
  • Teaching-Learning Smart Wafer Mapping

Wide Temperature and Low Noise Chuck

  • Modular Chucks
  • Wide Range of Temperature from -80°C to 180°C
  • Advanced CDA Thermal Control
  • Technology, High Ramping Rate and High T Stability
  • Ultra-Low Noise for Accurate CIS / ALS / Light-Sensor Wafer Testing

Specifications

Feature Specification
Spectral Range 400nm to 1700nm
Color Contrast Temperature 3000K to 5200K
Area of Uniform Illumination 42mm x 25mm at >200mm working distance
Uniformity of Illumination Better than 98%
Short Term Light Instability ≤ 1% over 1hr
Long Term Light Instability ≤ 1% over 10hr
Working Distance (DUT and Last Optical Element) ≥ 200mm working distance
Monochromatic Light Generation 1) Center-Wavelength with 10nm FWHM: 420nm, 450nm, 490nm, 510nm, 550nm, 570nm, 620nm, 670nm, 680nm, 710nm, 780nm, 870nm
2) Center-Wavelength with 25nm FWHM: 1010, 1250, 1450nm
3) Center-Wavelength with 45±5nm FWHM: 815nm
4) Center-Wavelength with 50nm FWHM: 1600nm
5)Center-Wavelength with 60±5nm FWHM: 650nm
6) Center-Wavelength with 70±5nm FWHM: 485, 555nm
7) Center-Wavelength with 100±5nm FWHM: 1600nm
• Out of Band Light Transmission ≤ 0.01%
• Peak Transmission in Band-Pass Region ≥ 80%
• Center-Wavelength Tolerance: (a) ±2nm; (b)~(g) ≤ ±5nm
• FWHM Tolerance: (a) ≤ ±2nm; (b)~(g) ≤ ±5nm
Variable Attenuator PC controlled, 3-decade resolution with at least 1000 steps
Wafer Size Capability 200mm, 150mm, 100mm wafers and single die >1cm x 1cm
Wafer Handling Single wafer, manual feed type
Semi-automation One step manual align teach and automatic die stepping

Applications

  • CIS/ALS/Light-Sensor Wafer Testing;
  • CIS/ALS/Light-Sensor Wafer Mapping and Yield Checking
  • ToF Sensor Testing
  • LiDAR Sensor Testing
  • InGaAs PD testing
  • SPAD sensor Testing
  • Light-Sensor Analog Parameters Testing:
    1. Quantum Efficiency
    2. Spectral Response
    3. System Gain
    4. Sensitivity
    5. Dynamic Range
    6. Dark Current/ Noise
    7. SNR
    8. Saturation Capacity
    9. Linearity Error(LE)
    10. DCNU (Dark Current Non-Uniformity)
    11. PRNU (Photo Response Non-Uniformity)

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