Overview
- The laser scanning defect imager is an upgraded version of the Laser Beam Induced Current (LBIC) test.
- It utilizes a laser beam with a wavelength energy greater than the semiconductor bandgap to irradiate the semiconductor, generating electron-hole pairs.
- By rapidly scanning the surface of the sample, it obtains an image distribution that reveals changes in internal current to analyze various defect distributions.
- This helps in analyzing the quality of sample preparation and aids in process improvement.





