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    SC QUBE SERIES: ALD Batch System for R & D and Small Scale Production

    The SC Qube is an ALD batch system  for R&D and small-scale production, to coat different kinds and sizes of 3D parts. The patent-pending scalable chamber from Swiss Cluster can be configured to fit to all types of 3D parts and coating material requirements to deliver exceptional coating homogeneity at unparalleled process speeds. The single chamber approach makes it easy to configure the chamber, integrate to a cleanroom or to a glovebox unit with an easy front loading of 3D parts with custom-made holders.

    Overview

    SC Qube Series

    • The SC Qube is an ALD batch system for R & D and small scale production to coat different kinds and sizes of 3D parts.
    • The patent-pending scalable chamber from Swiss Cluster can be configured to

    fit to all types of 3D parts and coating material requirements to deliver

    exceptional coating homogeneity at unparalleled process speeds.

    • Our single chamber approach makes it easy to configure the chamber,

    integrate to a cleanroom or to a glovebox unit with an easy front loading

    of 3D parts with custom-made holders.       

    Specifications

    Parameter Specification
    Chamber Dimensions Adapted to your 3D parts and coating material
    3 L – 50L
    150x150x150mm – 370x370x370mm
    Loading Front loading with guided door
    Custom-made frame holders for 3D parts
    Cleanroom compatible
    Glovebox compatible
    Process Temperatures Up to 500°C
    Precursors Up to 8 gas sources with 6 individual inlets
    Ozone option
    Standard Materials Al2O3, ZnO, SiO2, TiO2, Y2O3, Nitrides
    Novel bubbler delivery system optimised for low vapour pressure precursors
    500 nm Al2O3 < 1% 1-sigma uniformity
    Substrate Sizes Multiple substrates or 3D objects of various shapes and sizes
    Dimensions of chamber and holder are optimally adapted to the parts and coating material

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