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    SC OPTIMA SERIES: Large Batch Systems for Atomic Layer Deposition

    The SC Optima Series is the next generation of large batch systems for Atomic Layer Deposition (ALD). The SC Optima has been carefully optimised to deliver high-quality and uniform coatings to all types of 3D objects in record time, streamlining every step of your door-to door processes, from loading to unloading. Experience a new level of precision and efficiency in 3D part coating with the new patent-pending chamber from Swiss Cluster. The innovative and scalable chamber has been optimally designed to adapt to all types of 3D parts and coating material to deliver exceptional coating homogeneity at unparalleled process speeds. The chamber approach makes it easy to load and unload 3D parts from the cleanroom, while the rest of the system is accessed from the grey room. This configuration also allows for ultra-fast heating and cooling of both the chamber walls and the parts themselves.

    Overview

    The SC Optima Series is the next generation of large batch systems for Atomic Layer Deposition (ALD). The SC Optima has been carefully optimised to deliver high-quality and uniform coatings to all types of 3D objects in record time, streamlining every step of your door-to door processes, from loading to unloading.

    Experience a new level of precision and efficiency in 3D part coating with the

    new patent-pending chamber from Swiss Cluster. The innovative and scalable

    chamber has been optimally designed to adapt to all types of 3D parts and coating

    material to deliver exceptional coating homogeneity at unparalleled process speeds.

    Our single chamber approach makes it easy to load and unload 3D parts from

    the cleanroom, while the rest of the system is accessed from the grey room. This also

    allows for ultra-fast heating and cooling of both the chamber walls and the parts

    themselves.

    Specifications

    Parameter Specification
    Chamber Dimensions Adapted to your 3D parts and coating material;
    70 L – 1000L;
    640x640x640mm – 900x1600x700mm
    Loading Front loading with guided cart;
    Custom-made frame holders for 3D parts;
    Cleanroom compatible;
    Glovebox compatible
    Process Temperatures Up to 500°C
    Precursors Up to 8 gas sources with 6 individual inlets;
    Ozone option
    Standard Materials Al2O3, ZnO, SiO2, TiO2, Y2O3, Nitrides;
    Novel bubbler delivery system optimised for low vapour pressure precursors;
    500 nm Al2O3 < 1% 1-sigma uniformity
    Substrate Sizes Multiple substrates or 3D objects of various shapes and sizes;
    Dimensions of chamber and holder are optimally adapted to the parts and coating material

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